Film Thickness Monitors

K150X Film Thickness Monitor and Controller

While our sputter coaters and thermal evaporators are fitted with process timers, more accurate and reproducible measurement of deposited layers can be achieved using a film thickness monitor.

The K150X Film Thickness Monitor (FTM) is an easy-to-use module that not only allows measurement of films, but is also able to terminate the deposition process at a predetermined thickness.

NB: The K150X is only available for our current range of coaters, or as a retro-fit to some models. Please contact us for details.

Key Features

• Optional attachment for our sputter coaters (except SC7620) and vacuum evaporators
• Accurate monitoring and control
• Can be retrofitted
• Digital display
• Resolution of 0.1nm
• Simple to set up and operate
• Three-year warranty

Product Description

Easy operation

The K150X consists of a control unit and a crystal holder with an interconnection lead and oscillator. A simple, four-digit, ‘auto zero’ digital display makes it easy to set up and operate. A vacuum collar is supplied to suit the appropriate instrument chamber, and an oscillating 5MHz quartz crystal is mounted in the vacuum chamber so that one face of the crystal is exposed towards the deposition source, allowing it to receive the sputtered or evaporated film on its upper surface.

Accuracy and convenience

The crystal is connected via a vacuum feed through to an external oscillator whose output is controlled by the frequency of crystal oscillation. As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to determine the thickness of material deposited and is displayed digitally on the FTM.

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